管式扩散氧化退火炉
设备名称 Equipment name
管式扩散氧化退火炉 Horizontal Diffusion/Oxidation/Annealing Equipment
设备型号 Equipment Model
DOA-420
设备用途 Equipment Application
主要用于晶体硅太阳能电池制造中硅片的掺杂形成PN结。
The equipment is mainly used for doping and form PN junctions on silicon wafers in the manufacturing process of crystalline silicon solar cells.
工艺流程 Process Flow
石英舟及硅片准备→插片→上料→选择工艺运行→进舟→抽真空→升温稳定→通氧→通源→推进→恒温→出舟→下舟冷却→测试→卸片
Prepare quartz boat & wafers→Insert wafers→Loading wafers→Choose recipe→Boat loading→tube Vacuuming→Temperature rising→Oxygen inlet→Pocl3 inlet→Push in→DOA treatment→Boat unloading→Cooling→Testing→Wafer unloading
技术特点 Features
1、低压扩散、氧化、退火功能。
Low pressure diffusion, oxidation and annealing.
2、高方阻技术解决方案。
High sheet resistance technology solution.
3、配套相关专利技术，可适用于硼扩散工艺。
Patented technology, available for Boron diffusion.
4、独特双嵌套炉门结构。
Unique double-layer-embedment furnace door structure.
5、专利技术尾气处理系统。
Patented technology for exhaust gas treatment system.
6、高速平稳整体模组推舟机构。
High-speed integral module boat pushing mechanism.
7、高精度源压稳定技术。
High precision air source pressure stabilization technology.
8、智能化全自动控制。
Intelligent automatic control.
9、自主知识产权MES软件。
MES software with independent intellectual property right.
10、全面的防超温、断偶、撞舟等安全报警保护功能。
Alarm protection for over-heating, thermocouple -break and boat collision.
11、匹配S.C智能化生产管理系统。
Match S.C smart factory solution.
设备参数 Parameters
